Roll-to-roll substrates transferring unit and method of processing substrates using the substrates transferring unit

ABSTRACT

A flexible and continuous substrates-conveying sheet has a plurality of to be processed substrates disposed on or in it. A nondestructive transferring unit includes a plurality of first transferring rolls and a plurality of second transferring rolls. The first transferring rolls make contact with a first surface of the substrates-conveying sheet where that surface can have electrostatically-induced charge formed thereon. Each of the first transferring rolls includes a first central portion charged with a positive electric charge and a first outer portion surrounding the first central portion. The second transferring rolls make contact with the first surface of the substrates-conveying sheet. The second transferring rolls are disposed alternately with the first transferring rolls. Each of the second transferring rolls includes a second central portion charged with a negative electric charge and a second outer portion surrounding the second central portion.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation application of U.S. patentapplication Ser. No. 13/535,097 filed on Jun. 27, 2012, which claimspriority to Korean Patent Application No. Korean Patent Application No.10-2011-0096493, filed on Sep. 23, 2011 in the Korean IntellectualProperty Office (KIPO), and all the benefits accruing therefrom under 35U.S.C. §119, the contents of the prior applications being hereinincorporated by reference.

BACKGROUND

1. Field of Disclosure

The present disclosure of invention relates to a substrate transferringunit, a substrate processing apparatus including the substratetransferring unit and a method of processing a substrate using thesubstrate processing apparatus. More particularly, the presentdisclosure of invention relates to a substrate transferring unitconfigured for protecting a processed surface of a substrate, asubstrate processing apparatus including the substrate transferring unitand a method of processing a substrate using the substrate processingapparatus.

2. Description of Related Technology

A roll-to-roll processing means can operate on a thin flexible substratewhich is part of a continuum of such flexible substrates and which cancontinuously be transferred from a supplying roll to a receiving roll.The substrate may include one of a paper, a flexible plastic, a flexiblemetal foil and a flexible thin glass.

Recently, a flexible display apparatus has been developed. The flexibledisplay apparatus can be made to have a light weight such that it isportable, economical and durable. The use of roll-to-roll processing formanufacturing a display panel of the flexible display kind iscontemplated here. By using roll-to-roll processing, the manufacturingof the flexible display panel may be more automatized and may becomefaster than a manufacturing process where in-process substrates areindividually operated on. Thus, a mass productivity of flexible-typedisplay apparatuses may be improved.

Generally, when transferring rolls respectively make contact with anupper surface of a flexible substrate on which a manufacturing processis being carried out and also make contact with a lower surface of thesubstrate opposite to the upper surface, the being-processed surface ofthe substrate may be damaged. For example, the processed surface of thesubstrate may be scratched. More specifically, when the transferringroll makes contact with a processed surface of a substrate of thedisplay panel, a signal wiring on the substrate may become disconnected(e.g., broken into an opened circuit state) so that a productivity and areliability of the display panel may be deteriorated. In addition, astress-induced stain may be shown on a latter viewed portion of thesubstrate so that a display quality of the display panel may bedeteriorated.

When a process of attaching a separate protecting sheet and a process ofdetaching the protecting sheet are added to protect the processedsurface of the substrate, a manufacturing cost of the display panel maybe disadvantageously increased. In addition, the processed surface maybe stained during the processes of attaching and detaching theprotecting sheet. For example, when an alignment layer which isrelatively sensitive, has a protecting sheet attached and/or detachedtherefrom, the alignment layer may lose an alignment force by theprotecting sheet.

To protect the processed surface of the substrate, a step-typetransferring roll may be employed. The step-type transferring roll has arecessed portion corresponding to a central portion so that the centralportion of the step-type transferring roll does not make contact withthe substrate. Only side portions of the step-type transferring rollmake contact with the substrate to transfer the substrate. Thus, atransferring force of the step-type transferring roll is relativelyweak. In addition, when a dimension of the step-type transferring rollmaking contact with the substrate is increased so as to increase contactarea, a usage efficiency of the substrate may be decreased.

To protect the processed surface of the substrate, an air levitationtransferring roll may be employed. When the air levitation transferringroll is used to transfer the substrate, a noise may be generated and amanufacturing cost of the display panel may be increased. In addition,the air levitation transferring roll requires presence of air so thatthe air levitation transferring roll may not be used in combination witha vacuum manufacturing process.

It is to be understood that this background of the technology section isintended to provide useful background for understanding the heredisclosed technology and as such, the technology background section mayinclude ideas, concepts or recognitions that were not part of what wasknown or appreciated by those skilled in the pertinent art prior tocorresponding invention dates of subject matter disclosed herein.

SUMMARY

Exemplary embodiments of the present disclosure of invention provide asubstrate transferring unit capable of effectively protecting anin-process surface of a substrate as it is advanced through one or moreprocessing stations.

Exemplary embodiments of the present disclosure of invention alsoprovide a substrate processing apparatus including the substratetransferring unit.

Exemplary embodiments of the present disclosure of invention alsoprovide a method of processing a continuous sheet having in-processsubstrates disposed in or on it by using the substrate processingapparatus.

In an exemplary embodiment of a substrate transferring unit according tothe present disclosure, the substrate transferring unit includes aplurality of first transferring rolls and a plurality of secondtransferring rolls. The first transferring rolls make contact with afirst surface of a substrates-conveying sheet. The first surface iselectrically insulative and capable of retaining thereon anelectrostatically-induced charge. Each of the first transferring rollsincludes a first central portion charged with a positive electric chargeand a first outer portion surrounding the first central portion. Thesecond transferring rolls make contact with the first surface of thesubstrates-conveying sheet. The second transferring rolls are disposedalternately with the first transferring rolls. Each of the secondtransferring rolls includes a second central portion charged with anegative electric charge and a second outer portion surrounding thesecond central portion.

In the exemplary embodiment, the substrates-conveying sheet may be aflexible one. The first and second transferring rolls may be disposedalong a curved line matching a flexed curve form into which thesubstrates-conveying sheet may be bent.

In the exemplary embodiment, the first and second central portions ofthe first and second transferring rolls may include a metal. The firstand second outer portions of the first and second transferring rolls mayinclude an insulating material.

In the exemplary embodiment, the substrate transferring unit may furtherinclude a plurality of third transferring rolls making contact with thefirst surface of the substrate and not charged.

In the exemplary embodiment, one of the first transferring rolls and oneof the second transferring rolls may be alternately disposed with eachother.

In the exemplary embodiment, two of the first transferring rolls and twoof the second transferring rolls may be alternately disposed with eachother.

In an exemplary embodiment of a substrate processing apparatus accordingto the present disclosure of invention, the substrate processingapparatus includes a supplying part, a supplying driver, a patterningpart, a receiving driver and a receiving part. The supplying partincludes a supplying roll supplying a substrates-conveying sheet. Thesupplying driver is disposed adjacent to the supplying part. Thesupplying driver provides a driving power to advance thesubstrates-conveying sheet. The patterning part forms a pattern on thesubstrates of the substrates-conveying sheet. The receiving driverprovides a driving power to receive the substrate. The receiving part isdisposed adjacent to the receiving driver. The receiving part includes areceiving roll receiving the substrates-conveying sheet. At least one ofthe supplying driver, the patterning part and the receiving driverincludes a plurality of first transferring rolls and a plurality ofsecond transferring rolls. The first transferring rolls make contactwith a first surface of the substrates-conveying sheet. Each of thefirst transferring rolls includes a first central portion charged with apositive electric charge and a first outer portion surrounding the firstcentral portion. The second transferring rolls make contact with thefirst surface of the substrates-conveying sheet. The second transferringrolls are disposed alternately with the first transferring rolls. Eachof the second transferring rolls includes a second central portioncharged with a negative electric charge and a second outer portionsurrounding the second central portion.

In the exemplary embodiment, the substrates-conveying sheet may be aflexible one. The first and second transferring rolls may be disposedalong a curved line.

In the exemplary embodiment, the first and second central portions ofthe first and second transferring rolls may include a metal. The firstand second outer portions of the first and second transferring rolls mayinclude an insulating material.

In the exemplary embodiment, at least one of the supplying driver, thepatterning part and the receiving driver may further include a pluralityof third transferring rolls making contact with the first surface of thesubstrate and not charged.

In the exemplary embodiment, the substrate processing apparatus mayfurther include an accumulator disposed between the patterning part andthe receiving driver and transferring the patterned substrates and beingconfigured to adjust a processing timing.

In the exemplary embodiment, the accumulator may include the first andsecond transferring rolls disposed along a curved line.

In the exemplary embodiment, the substrate processing apparatus mayfurther include a second patterning part and a second accumulator. Thesecond patterning part may be disposed between the accumulator and thereceiving driver. The second patterning part may form a second patternon the substrates. The second accumulator may be disposed between thesecond patterning part and the receiving driver. The second accumulatormay transfer the substrate on which the second pattern is formed toadjust a processing timing.

In the exemplary embodiment, a first duration during which thesubstrates pass through the accumulator may be different from a secondduration during which the substrates pass through the secondaccumulator.

In the exemplary embodiment, the substrate processing apparatus mayfurther include a drying part disposed between the patterning part andthe receiving driver and drying the patterns formed on the substrates.

In the exemplary embodiment, the substrate processing apparatus mayfurther include a tension sensing part including a sensing roll sensinga tension of the substrates-conveying sheet and generating a tensionfeedback signal to uniformly maintain the tension of the sheet.

In the exemplary embodiment, the supplying driver, the patterning partand the receiving driver may be operated under a vacuum-like condition.

In an exemplary embodiment of a method of processing a continuous sheetof substrates according to the present disclosure of invention, themethod includes applying a positive electric charge to a plurality offirst transferring rolls making contact with a first surface of thesubstrates-conveying sheet, applying a negative electric charge to aplurality of second transferring rolls making contact with the firstsurface of the substrates-conveying sheet and disposed alternately withthe first transferring rolls, supplying the substrate wound at asupplying roll, forming a pattern on the substrates, and winding thesubstrates-conveying sheet at a receiving roll. Each of the firsttransferring rolls includes a first central portion charged with apositive electric charge and a first outer portion surrounding the firstcentral portion. Each of the second transferring rolls including asecond central portion charged with a negative electric charge and asecond outer portion surrounding the second central portion.

In the exemplary embodiment, the substrates-conveying sheet may be aflexible one. The first and second transferring rolls may be disposedalong a curved line.

In the exemplary embodiment, the method may further include transferringthe patterned substrates according to an adjustable processing timing.

In the exemplary embodiment, the method may further include sensing atension of the substrates-conveying sheet and generating a tensionfeedback signal to uniformly maintain the tension of thesubstrates-conveying sheet.

In the exemplary embodiment, the pattern may be formed on the substratesunder a vacuum-like condition.

According to the substrate transferring unit, the substrate processingapparatus including the substrate transferring unit and the method ofprocessing the substrates using the substrate processing apparatus, thetransferring rolls do not make direct contact with the processedsurfaces of the substrates so that the processed surfaces of thesubstrates may be effectively protected.

When the so-produced substrates are employed as respective elements of adisplay panel, a productivity, a reliability and a display quality ofthe display panel may be improved and a manufacturing cost of thedisplay panel may be decreased.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages of the present teachingswill become more apparent by describing in detailed exemplaryembodiments with reference to the accompanying drawings, in which:

FIG. 1 is a cross-sectional view illustrating a substrate processingapparatus according to an exemplary embodiment in accordance with thepresent disclosure of invention;

FIG. 2 is an exploded cross-sectional view illustrating a portion ‘A’ ofFIG. 1;

FIG. 3 is an exploded cross-sectional view illustrating a portion ‘B’ ofFIG. 1;

FIG. 4 is a cross-sectional view illustrating a substrate transferringunit according to another exemplary embodiment;

FIG. 5 is a cross-sectional view illustrating a substrate processingapparatus according to still another exemplary embodiment; and

FIG. 6 is a cross-sectional view illustrating a portion of a substrateprocessing apparatus according to still another exemplary embodiment.

DETAILED DESCRIPTION

Hereinafter, the present disclosure of invention will be explained indetail with reference to the accompanying drawings.

FIG. 1 is a cross-sectional view illustrating a substrate processingapparatus according to an exemplary embodiment.

Referring to FIG. 1, the substrate processing apparatus includes asupplying part 100 (source spool), a supplying driver 200, a patterningpart 300 (as an example of a substrate processing station), anaccumulator 400, a drying part 500, a receiving driver 600 and areceiving part 700 (uptake spool).

The supplying part (source spool) 100 includes a supplying rollsupplying a continuous sheet of substrates-carrying flexible materialssheet S to the patterning part 300. The substrates-carrying sheets sheetS is wound at the supplying roll. The supplying part 100 includes atleast one transferring roll R to supply the substrates-carrying sheetssheet S to the patterning part 300. Although not yet shown at such levelof detail in FIG. 1, it is to be understood that the continuous sheet ofsubstrates-carrying flexible materials sheet S includes an electricallyinsulative bottom most film or surface composition that is capable ofretaining electrostatically-induced charge areas.

The flexible material of the substrates-carrying sheet S may include aflexible plastic, a flexible metal foil and/or a flexible thin glasslayer. (In the case where the flexible metal foil is used, anelectrically insulative and flexible film is disposed under the metal soas to be able to retain electrostatically-induced charge, as shallbecome clearer below.) More specifically and for example, thesubstrates-carrying sheets sheet S may include a polycarbonate PC and/ora polyethyleneterephthalate PET.

The supplying driver 200 is disposed adjacent to the supplying part 100.The supplying driver 200 receives the substrates-carrying sheet Soutputted from the supplying part 100.

The supplying driver 200 provides a driving power to pull and unwind thesubstrates-carrying sheets sheet S from the supplying part (sourcespool) 100 and thus supply the substrates-carrying sheets sheet S in anunwound and forward moving state to downstream subsequent stations. Thesupplying driver 200 may include a substrate transferring unit. Thesupplying driver 200 may include a plurality of transferring rolls R.

The supplying driver 200 may output the substrates sheet S as moving outalong a straight line. Alternatively, the supplying driver 200 mayoutput the substrates sheet S as moving out along a curved line (notshown).

The supplying driver 200 may include a section operating under lowpressure (below ambient pressure) or in a vacuum for purpose of removingundesired vapors or gases if needed.

The transferring rolls R make contact only with a not-worked firstsurface (e.g., lower surface in FIG. 1) of the advancing substratessheets sheet S. The substrates sheets sheet S includes a being-processedsurface (worked second surface) on which one or more manufacturingprocesses may be carried out as the substrates sheets sheet S advancesfrom the supplying driver 200 to the respooling driver 600 (receivingdriver 600). The first surface of the substrates sheets sheet S may bedisposed opposite to the being-processed surface (worked second)surface.

Radiuses of the transferring rolls R may be varied according torespective positions and desired functions of the respectivetransferring rolls R. Alternatively, radiuses of the transferring rollsR may be substantially the same as each other.

The transferring rolls R and their functions will be explained in moredetail when referring to FIGS. 2 and 3 below.

The patterning part 300 is disposed adjacent to and downstream of thesupplying driver 200. The patterning part 300 receives the substratessheets sheet S outputted from the supplying driver 200.

In the given example, the patterning part 300 forms a predeterminedpattern on the substrates sheet S. More specifically, the patterningpart 300 forms the pattern on the processed second surface of thesubstrates sheets sheet S. It is to be understood that such patterningis merely one example of various manufacturing processes that may becarried out on the substrates sheets sheet S as it is advanced from asupply spool (e.g., 100) to a final take-up spool (e.g., 700). Examplesof other manufacturing processes include, but are not limited to,depositing films or ink jet dots on the substrate, removing films orsacrificial portions, applying alignment (e.g., by rubbing) to analignment layer and so on.

The exemplary patterning part 300 may include a substrate transferringunit. The patterning part 300 may include a plurality of correspondingtransferring rolls R.

The patterning part 300 may move the substrates sheets sheet S along astraight line when the pattern is formed on the substrates sheets sheetS. Alternatively, the patterning part 300 may move the substrates sheetssheet S along a curved line when the pattern is formed on the substratessheet S.

The patterning part 300 may include a patterning unit 310, a fixing part320 and a supporting part 330. The patterning unit 310 is disposed overthe processed surface of the substrates sheet S to form the pattern atdesired locations on the processed surface of the substrates sheet S.The fixing part 320 fixes (e.g., temporarily clamps down) the patterningunit 310. The fixing part 320 may move the patterning unit 310 in apredetermined direction. The supporting part 330 supports the substratessheet S in a processing position.

The patterning part 300 may form the pattern using a printing process.For example, the patterning unit 310 may include a roll printing part.The printing roll may be driven by the fixing part 320. The printingroll may move with the fixing part 320 to form the pattern on thesubstrates sheet S.

The patterning part 300 may alternatively or additionally form thepattern using a photoresist-based lithography process. For example, thepatterning part 300 may operate a chemical vapor deposition process anda sputtering process.

The patterning part 300 may include a section operating under lowpressure (below ambient pressure) or in a vacuum; for example forpurpose of removing undesired vapors or gases if needed.

The accumulator 400 is disposed adjacent to and downstream of thepatterning part 300. The accumulator 400 receives the substrates sheet Soutputted from the patterning part 300.

The accumulator 400 transfers the patterned substrates sheet S in anidler pulley wheel type of fashion to thereby adjust for processingtiming and/or sheet flow rate variations. For example, the accumulator400 adjusts the processing timing between the patterning process of thepatterning part 300 and other processes. For example, the accumulator400 may adjust the processing timing between the patterning process ofthe patterning part 300 and a drying process of the drying part 500. Theaccumulator 400 may adjust the processing timing between multiplepatterning processes.

The accumulator 400 may adjust an output timing of the substrates sheetS by setting a variable length of a transferring path of the substratessheet S. For example, when the patterning process of the patterning part300 is shorter than other process, the transferring path of thesubstrates sheet S of the accumulator 400 is temporarily increased to berelatively long, so that the output timing of the substrates sheet S maybe temporarily delayed. For example, when the patterning process of thepatterning part 300 is longer than other process, the transferring pathof the substrates sheet S of the accumulator 400 is set to be relativelyshorter, so that the output timing of the substrates sheet S may bequickened.

The accumulator 400 may include a substrate transferring unit. Theaccumulator 400 may include a plurality of corresponding transferringrolls R.

The accumulator 400 may move the substrates sheet S along a straightline. Alternatively, the accumulator 400 may move the substrates sheet Salong a curved line. For example, the accumulator 400 may include one ormore curved transferring paths of the substrates sheet S to variablydelay the output timing of the advancing substrates sheet S as needed.

The accumulator 400 may include a section operating under low pressure(below ambient pressure) or in a vacuum; for example for purpose ofremoving undesired vapors or gases if needed.

In an exemplary embodiment, when the substrate processing unit operatesa single process, the accumulator 400 may be omitted. In an exemplaryembodiment, when the processing times of the multiple processes aresubstantially same as each other, the accumulator 400 may be omitted.

The drying part 500 is disposed adjacent to and downstream of theaccumulator 400. The drying part 500 receives the substrates sheet Soutputted from the accumulator 400.

The drying part 500 dries the pattern formed on the substrates sheet S.The drying part 500 may include an oven. For example, the drying part500 may dry the pattern using heat and/or a vapor absorbing gas flow.For example, the drying part 500 may dry the pattern using anultraviolet ray. For example, the drying part 500 may dry the patternusing a microwave.

The drying part 500 may adjust a drying duration of the substrates sheetS by setting a length of a transferring path of the substrates sheet S.For example, as the transferring path of the substrates sheet Sincreases, the drying duration of the substrates sheet S increases.

The drying part 500 may include a substrate transferring unit. Thedrying part 500 may include a plurality of corresponding transferringrolls R.

The drying part 500 may move the substrates sheet S along a straightline. Alternatively, the drying part 500 may move the substrates sheet Salong a curved line. For example, the drying part 500 may include atransferring path of the substrates sheet S which has a plurality ofcurved portions to guarantee enough of a drying duration for thesubstrates sheet S.

The drying part 500 may include a section operating under low pressure(below ambient pressure) or in a vacuum; for example for purpose ofremoving undesired vapors or gases if needed.

In an exemplary embodiment, when a pattern on the substrates sheet Sformed in the patterning part 300 does not require a drying process, thedrying part 500 may be omitted. In an exemplary embodiment, the dryingpart 500 may be disposed in the patterning part 300.

The receiving driver 600 is disposed adjacent to and downstream of thedrying part 500. The receiving driver 600 receives the substrates sheetS outputted from the drying part 500.

The receiving driver 600 provides a driving power to receive thesubstrates sheet S. The receiving driver 600 may include a substratetransferring unit. The receiving driver 600 may include a plurality ofcorresponding transferring rolls R.

The receiving driver 600 may move the substrates sheet S along astraight line. Alternatively, the receiving driver 600 may move thesubstrates sheet S along a curved line.

The receiving driver 600 may include a section operating under lowpressure (below ambient pressure) or in a vacuum; for example forpurpose of removing undesired vapors or gases if needed.

The receiving part (take-up spool) 700 is disposed adjacent to anddownstream of the receiving driver 600. The receiving part 700 receivesthe substrates sheet S outputted from the receiving driver 600.

The receiving part 700 includes a receiving roll receiving thesubstrates sheet S. After the process, the substrates sheet S is woundonto the receiving roll. The receiving part 700 includes at least onetransferring roll R similar to that of the supplying part 100 to receivethe substrates sheet S before it is wound about the receiving roll.

FIG. 2 is an exploded cross-sectional view illustrating a portion ‘A’ ofFIG. 1.

Referring to FIG. 2, the portion ‘A’ represents a substrate transferringunit which transfers the substrates sheet S along a straight line. Thesubstrate transferring unit includes a plurality of first transferringrolls R1, R3 and R5 and a plurality of second transferring rolls R2, R4and R6.

The first and second transferring rolls R1 to R6 are disposed in astraight line in the example of FIG. 2. The first and secondtransferring rolls R1 to R6 make contact with a first surface of thesubstrates sheet S. The first surface of the substrates sheet S is asurface opposite to a processed surfaces area S1 of the substrates sheetS.

Each of the first and second transferring rolls R1 to R6 is insulativelyconnected to a driving motor. The first and second transferring rolls R1to R6 rotate in a direction (e.g., clockwise in the example of FIG. 2)to transfer the substrates sheet S in a desired direction. Thesubstrates sheet S is displaced by a charge-enhanced frictional forcedeveloped between each of the first and second transferring rolls R1 toR6 and the substrates sheet S. For example, when the first and secondtransferring rolls R1 to R6 rotate in a clockwise direction, thesubstrates sheet S may be displaced from left to right in the example ofFIG. 2 due to action of the charge-enhanced frictional forces developedas between the lower surface of the substrates sheet S and engagedsurface portions of the transferring rolls R1 to R6.

Each of the first transferring rolls R1, R3 and R5 includes anelectrically-chargeable central portion and an insulative outer portionsurrounding the central portion. The central portion may be an electrodeportion. The central portion may include a conductive metal. The outerportion may include an insulating material with relatively highdielectric breakdown characteristics. For example, the outer portion mayinclude a ceramic such as polyimide or aluminum oxide.

The central portions of the first transferring rolls R1, R3 and R5 arecharged with positive electric charges (+) relative to a referenceground node or plane (not shown). Accordingly, formation of opposednegative electric charges (−) may be induced at portions of thesubstrates sheet S closest to the central portions of the firsttransferring rolls R1, R3 and R5. Thus, due to induction ofelectrostatic attraction, an attractive force is generated between thesubstrates sheet S and the first transferring rolls R1, R3 and R5. Thematerial of a lowest portion (e.g., bottommost film) of the flexiblesubstrates sheet S may be selected so as to be susceptible to easyinduction of electric charge thereat. That lowest portion (e.g.,bottommost film) may be a sacrificial portion that is selectivelyremoved after completion of roll-to-roll processing. Although not shownin FIG. 2 for sake of avoiding illustrative clutter, the referenceground node or plane (not shown) may be defined by a plurality ofgrounded and free-wheeling metallic rollers that engage with the outerdiameters of transferring rolls R1-R6 at positions spaced apart fromwhere the transferring rolls R1-R6 engage with the substrates sheet S.An electric field is formed through across the insulative outer skins ofthe rolls R1-R6 as between their conductive central electrodes and thenot-shown grounded and free-wheeling metallic rollers so that charge isbrought to the outer surfaces of the respective conductive centralelectrodes. That brought-out charge is then rotated by action of theroll driving motors and is used to electrostatically-induce furthercharge formation on the bottom most and insulative surface of theflexible substrates sheet S.

The electrostatically-induced attractive force between the substratessheet S and each of the first transferring rolls R1, R3 and R5 istypically in proportion to a square of a voltage applied to each of thefirst transferring rolls R1, R3 and R5, and is in inverse proportion toa square of a thickness of the outer insulative portion of each of thefirst transferring rolls R1, R3 and R5, and is further in proportion toa permittivity (dielectric constant) of the outer portion of each of thefirst transferring rolls R1, R3 and R5. (F→∈*V²/d²)

When the substrates sheet S is displaced by the charge-enhancedfrictional force between the first transferring rolls R1, R3 and R5 andthe substrates sheet S, the frictional force is based on the attractiveforce between the substrates sheet S and each of the first transferringrolls R1, R3 and R5.

Each of the second transferring rolls R2, R4 and R6 also similarlyincludes a central portion and an outer portion surrounding the centralportion. The central portion may be an electrode portion. The centralportion may include a metal. The outer portion may include an insulatingmaterial. For example, the outer portion may include a ceramic such aspolyimide or aluminum oxide.

The central portions of the second transferring rolls R2, R4 and R6 arecharged with negative electric charges (−). Accordingly, opposedpositive electric charges (+) are electrostatically induced at portionsof the substrates sheet S corresponding to the central portions of thesecond transferring rolls R2, R4 and R6. Thus, an attractive force isgenerated between the substrates sheet S and the second transferringrolls R2, R4 and R6.

When the substrates sheet S is displaced by the charge-enhancedfrictional force between the second transferring rolls R2, R4 and R6 andthe substrates sheet S, the frictional force is based on the attractiveforce between the substrates sheet S and each of the second transferringrolls R2, R4 and R6.

The first and second transferring rolls R1 to R6 transfer the substratessheet S using electrostatic induction so that the first and secondtransferring rolls R1 to R6 do not make contact with the processedsurfaces S1 of the substrates sheet S to transfer the substrates sheetS. Thus, the processed surfaces S1 of the substrates sheet S may beprotected from direct engagement with a propulsion device when thesubstrates sheet S is displaced.

The first transferring rolls R1, R3 and R5 and the second transferringrolls R2, R4 and R6 are alternately disposed with each other. Forexample, one of the first transferring rolls and one of the secondtransferring rolls are alternately disposed with each other.Alternately, although not shown in figures, two of the firsttransferring rolls and two of the second transferring rolls arealternately disposed with each other. Alternately, a group having threeor more first transferring rolls and a group having three or more secondtransferring rolls are alternately disposed with each other.

FIG. 3 is an exploded cross-sectional view illustrating a portion 13′ ofFIG. 1.

Referring to FIG. 3, the portion ‘B’ represents a direction changingunit which transfers the substrates sheet S along a curved line. Thedirection changing unit includes a plurality of first transferring rollsR8, R10 and R12 and a second transferring rolls R9, R11 and R13.

The first and second transferring rolls R8 to R13 are disposed along asmoothly curved line. The first and second transferring rolls R8 to R13make contact with a first surface of the substrates sheet S. The firstsurface of the substrates sheet S is a surface opposite to the processedsurfaces S1 of the substrates sheet S.

Each of the first and second transferring rolls R8 to R13 is connectedto a driving motor. The first and second transferring rolls R8 to R13rotate in a direction needed to transfer the substrates sheet S asdesired. The substrates sheet S is displaced by a charge-enhancedfrictional force between the first and second transferring rolls R8 toR13 and the substrates sheet S. For example, the first and secondtransferring rolls R8 to R13 may rotate in a clockwise direction. Whenthe first and second transferring rolls R8 to R13 rotate in a clockwisedirection, the substrates sheet S may be displaced in a lower directionand in an upper direction.

Each of the first and second transferring rolls R8 to R13 includes acentral portion and an outer portion surrounding the central portion.The central portion may be an electrode portion. The outer portion mayinclude an insulating material.

The central portions of the first transferring rolls R8, R10 and R12 arecharged with positive electric charges (+). Accordingly, negativeelectric charges (−) are induced at portions of the substrates sheet Scorresponding to the central portions of the first transferring rollsR8, R10 and R12. Thus, a charge-enhanced attractive force is generatedbetween the substrates sheet S and the first transferring rolls R8, R10and R12.

The central portions of the second transferring rolls R9, R11 and R13are charged with negative electric charges (−). Accordingly, positiveelectric charges (+) are induced at portions of the substrates sheet Scorresponding to the central portions of the second transferring rollsR9, R11 and R13. Thus, an attractive force is generated between thesubstrates sheet S and the second transferring rolls R9, R11 and R13.

The first and second transferring rolls R8 to R13 change a transferringdirection of the substrates sheet S using electrostatic induction sothat the first and second transferring rolls R8 to R13 do not makecontact with the processed surfaces sheet S1 of the substrates sheet Sto change the transferring direction of the substrates sheet S. Thus,the processed surfaces sheet S1 of the substrates sheet S may beprotected when the substrates sheet S is displaced. The total number offirst and second transferring rolls R8 to R13 does not have to be aneven number and instead may be an odd number whereby the polarities ofthe transferring rolls at the top of the U-shape in the transfer pathare the same and the electrostatically-induced charges they induce inthe substrates sheet S repel each other due to sameness of polarity.Therefore the U-shape is prevented from collapsing inwardly. Thestiffness of the flexible substrates sheet S may also play a role inpreventing the U-shape from collapsing inwardly.

The first transferring rolls R8, R10 and R12 and the second transferringrolls R9, R11 and R13 are alternately disposed with each other. Forexample, one of the first transferring rolls and one of the secondtransferring rolls are alternately disposed with each other; but asimplied above, the pattern may be reversed half way around the U-shapedpath so that the charge distribution has mirror image symmetry withrespect to the vertical central axis of the U-shape.

According to the present exemplary embodiment, the transferring rolls donot make contact with the processed surface of the substrate to transferthe substrate and to change the transferring direction of the substrateso that the processed surface of the substrate may be protected.

In addition, when the substrate of the present exemplary embodiment isemployed as an element of a display panel, a productivity, a reliabilityand a display quality of the display panel may be improved and amanufacturing cost of the display panel may be decreased.

In addition, comparing to the step-type transferring process, a usageefficiency of the substrate may be increased.

In addition, comparing to an air levitation transferring process, thesubstrate may be processed while in a vacuum or allow pressurecondition, and a noise may be prevented and a manufacturing cost of thesubstrate may be decreased.

FIG. 4 is a cross-sectional view illustrating a substrate transferringunit according to another exemplary embodiment.

A substrate processing apparatus and a method of processing a substrateaccording to the present exemplary embodiment is substantially the sameas the substrate processing apparatus and the method of processing asubstrate of the previous exemplary embodiment explained referring toFIGS. 1 to 3 except for the structure of the substrate transferringunit. Thus, the same reference numerals will be used to refer to thesame or like parts as those described in the previous exemplaryembodiment of FIGS. 1 to 3 and any repetitive explanation concerning theabove elements will be omitted.

Referring to FIGS. 1 and 4, the substrate processing apparatus using thestructure shown in FIG. 4 includes a supplying part 100, a supplyingdriver 200, a patterning part 300, an accumulator 400, a drying part500, a receiving driver 600 and a receiving part 700 substantially asdescribed above.

Referring to FIG. 4, the substrate transferring unit includes aplurality of first transferring rolls R15 and R18, a plurality of secondtransferring rolls R16 and R19 and a plurality of third transferringrolls R17 and R20.

The first to third transferring rolls R15 to R20 are disposed in astraight line. The first to third transferring rolls R15 to R20 makecontact with a first surface of the substrates sheet S. The firstsurface of the substrates sheet S is a surface opposite to a processedsurfaces S1 of the substrates sheet S.

Each of the first and second transferring rolls R15, R16, R18 and R19 isconnected to a driving motor. The first and second transferring rollsR15, R16, R18 and R19 rotate in a direction to transfer the substratessheet S. The substrates sheet S is displaced by a charge-enhancedfrictional force developed between the first and second transferringrolls R15, R16, R18 and R19 and the substrates sheet S. For example, thefirst and second transferring rolls R15, R16, R18 and R19 may rotate ina clockwise direction. When the first and second transferring rolls R15,R16, R18 and R19 rotate in a clockwise direction, the substrates sheet Smay be displaced from left to right.

The third transferring rolls R17 and R20 may not be connected to adriving motor but are instead free-wheeling. The third transferringrolls R17 and R20 do not rotate by their own driving force. The thirdtransferring rolls R17 and R20 passively rotate as the substrates sheetS is displaced.

Each of the first and second transferring rolls R15, R16, R18 and R19includes a central portion and an outer portion surrounding the centralportion. The central portion may be an electrode portion. The outerportion may include an insulating material.

Each of the third transferring rolls R17 and R20 includes a centralportion including an electrode portion and an outer portion surroundingthe central portion and including an insulating material. Alternatively,each of the third transferring rolls R17 and R20 may not include theelectrode portion but only the insulating material.

The central portions of the first transferring rolls R15 and R18 arecharged with positive electric charges (+). Accordingly, negativeelectric charges (−) are induced at portions of the substrates sheet Scorresponding to the central portions of the first transferring rollsR15 and R18. Thus, an attractive force is generated between thesubstrates sheet S and the first transferring rolls R15 and R18.

The central portions of the second transferring rolls R16 and R19 arecharged with negative electric charges (−). Accordingly, positiveelectric charges (+) are induced at portions of the substrates sheet Scorresponding to the central portions of the second transferring rollsR16 and R19. Thus, an attractive force is generated between thesubstrates sheet S and the second transferring rolls R16 and R19.

The first and second transferring rolls R15, R16, R18 and R19 transferthe substrates sheet S using electrostatic induction so that the firstand second transferring rolls R15, R16, R18 and R19 do not make contactwith the processed surfaces S1 of the substrates sheet S to transfer thesubstrates sheet S. Thus, the processed surfaces sheet S1 of thesubstrates sheet S may be protected when the substrates sheet S isdisplaced.

The third transferring rolls R17 and R20 are not charged. Instead theymay be grounded or allowed to float electrically. Although the thirdtransferring rolls R17 and R20 form a transferring path of thesubstrates sheet S, the third transferring rolls R17 and R20 do notactively add transferring power the substrates sheet S.

The first transferring rolls R15 and R18, the second transferring rollsR16 and R19 and the third transferring rolls R17 and R20 are alternatelydisposed with one another. For example, one of the first transferringrolls, one of the second transferring rolls and one of the thirdtransferring rolls are alternately disposed with one another.

According to the present exemplary embodiment, the transferring rolls donot make contact with the processed surface of the substrate to transferthe substrate and to change the transferring direction of the substrateso that the processed surface of the substrate may be protected.

In addition, the substrate processing apparatus includes the thirdtransferring rolls which are not charged so that a driving power totransfer the substrate may be adjusted and a manufacturing cost of thesubstrate may be decreased. In one embodiment, each of the thirdtransferring rolls may be selectively transformed (with use ofelectrical switches—not shown) to instead act as one of the positivelyor negatively charged rollers for the purpose of selectively adding dragto the advancement of the substrates sheet S.

FIG. 5 is a cross-sectional view illustrating a substrate processingapparatus according to still another exemplary embodiment.

A substrate processing apparatus and a method of processing a substrateaccording to the present exemplary embodiment is substantially the sameas the substrate processing apparatus and the method of processing asubstrate of the previous exemplary embodiment explained referring toFIGS. 1 to 3 except that the substrate processing apparatus furtherincludes a tension sensing part 250. Thus, the same reference numeralswill be used to refer to the same or like parts as those described inthe previous exemplary embodiment of FIGS. 1 to 3 and any repetitiveexplanation concerning the above elements will be omitted.

Referring to FIG. 5, the substrate processing apparatus includes asupplying part 100, a supplying driver 200, a tension sensing part 250,a patterning part 300, an accumulator 400, a drying part 500, areceiving driver 600 and a receiving part 700.

The tension sensing part 250 is disposed adjacent to and downstream ofthe supplying driver 200. The tension sensing part 250 receives thesubstrates sheet S outputted from the supplying driver 200.

The tension sensing part 250 senses a tension of the substrates sheet Sand acts to uniformly maintain the tension of the substrates sheet S.

The tension sensing part 250 includes a sensing roll SR sensing thetension of the substrates sheet S. The tension sensing part 250 mayfurther include a signal generating part (not shown) generating atension feedback signal to be used to uniformly maintain the tension ofthe substrates sheet S based on the tension of the substrates sheet Ssensed by the sensing roll SR. The substrate processing apparatuscontrols a driving power of the driving motors connected to thetransferring rolls R based on the tension feedback signal. Alternativelyor additionally, drag-adding rollers such as the third ones of FIG. 4may be used to selectively control tension.

Although the tension sensing part 250 is disposed in front of thepatterning part 300 in the present exemplary embodiment, the presentteachings are not limited thereto. The tension sensing part 250 may bedisposed anywhere where the tension of the substrates sheet S isrequired to be uniformly maintained. A plurality of the tension sensingparts 250 may be formed in the substrate processing apparatus touniformly maintain the tension of the substrates sheet S.

According to the present exemplary embodiment, the transferring rolls donot make contact with the processed surface of the substrate to transferthe substrate and to change the transferring direction of the substrateso that the processed surface of the substrate may be protected.

In addition, the tension of the substrate is uniformly maintained sothat a productivity and a quality of the substrate may be improved.

FIG. 6 is a cross-sectional view illustrating a portion of a substrateprocessing apparatus according to still another exemplary embodiment.

A substrate processing apparatus and a method of processing a substrateaccording to the present exemplary embodiment is substantially the sameas the substrate processing apparatus and the method of processing asubstrate of the previous exemplary embodiment explained referring toFIGS. 1 to 3 except that the substrate processing apparatus includes aplurality of patterning parts and a plurality of accumulators. Thus,same or similar reference numerals will be used to refer to the same orlike parts as those described in the previous exemplary embodiment ofFIGS. 1 to 3 and any repetitive explanation concerning the aboveelements will be omitted.

Referring to FIGS. 1 and 6, the substrate processing apparatus includesa supplying part 100, a supplying driver 200, the patterning parts 300Ato 300D, the accumulators 400A to 400D, a drying part 500, a receivingdriver 600 and a receiving part 700.

The first patterning part 300A forms a first pattern among plural andpredetermined patterns on the substrates sheet S. The first patterningpart 300A forms the first pattern on the processed surface of thesubstrates sheet S. For example, the first pattern may be a black matrix(BM) pattern of a color filter substrate.

The first patterning part 300A may include a substrate transferringunit. The first patterning part 300A may include a plurality of thetransferring rolls R.

A first accumulator 400A is disposed adjacent to the first patterningpart 300A. The first accumulator 400A receives the substrates sheet Soutputted from the first patterning part 300A.

The first accumulator 400A transfers the substrates sheet S on which thefirst pattern is formed to adjust a processing timing. For example, thefirst accumulator 400A adjusts the processing timing between thepatterning process of the first patterning part 300A and otherprocesses. For example, the first accumulator 400A may adjust theprocessing timing between the patterning process of the first patterningpart 300A and a drying process of the drying part 500. The firstaccumulator 400A may adjust the processing timing between the patterningprocess of the first patterning part 300A and multiple patterningprocesses of other patterning parts 300B to 300D.

The first accumulator 400A may include a substrate transferring unit.The first accumulator 400A may include a plurality of the transferringrolls R.

A second patterning part 300B is disposed adjacent to the firstaccumulator 400A. The second patterning part 300B receives thesubstrates sheet S outputted from the first accumulator 400A.

The second patterning part 300B forms a second predetermined pattern onthe substrates sheet S. The second patterning part 300B forms the secondpattern on the processed surface of the substrates sheet S. For example,the second pattern may be a blue color filter pattern of the colorfilters substrate of a Liquid Crystal Display (LCD) having RGB or RGBWcolor filters as well as a black matrix (BM) pattern.

The second patterning part 300B may include a substrate transferringunit. The second patterning part 300B may include a plurality of thetransferring rolls R.

A second accumulator 400B is disposed adjacent to the second patterningpart 300B. The second accumulator 400B receives the substrates sheet Soutputted from the second patterning part 300B.

The second accumulator 400B transfers the substrates sheet S on whichthe first and second patterns are formed to adjust a processing timing.For example, the second accumulator 400B adjusts the processing timingbetween the patterning process of the second patterning part 300B andother processes. For example, the second accumulator 400B may adjust theprocessing timing between the patterning process of the secondpatterning part 300B and a drying process of the drying part 500. Thesecond accumulator 400B may adjust the processing timing between thepatterning process of the second patterning part 300B and multiplepatterning processes of other patterning parts 300A, 300C and 300D.

The second accumulator 400B may include a substrate transferring unit.The second accumulator 400B may include a plurality of the transferringrolls R.

Although a transferring path of the second accumulator 400B is same as atransferring path of the first accumulator 400A in FIG. 5 forconvenience of explanation, the present invention is not limitedthereto.

The transferring path of the second accumulator 400B may be differentfrom the transferring path of the first accumulator 400A. Accordingly, aduration during which the substrates sheet S passes through the secondaccumulator 400B may be different from a duration during which thesubstrates sheet S passes through the first accumulator 400A.

A third patterning part 300C is disposed adjacent to the secondaccumulator 400B. The third patterning part 300C receives the substratessheet S outputted from the second accumulator 400B.

The third patterning part 300C forms a third pattern on the substratessheet S. The third patterning part 300C forms the third pattern on theprocessed surface of the substrates sheet S. For example, the thirdpattern may be a green color filter pattern of the color filtersubstrate.

The third patterning part 300C may include a substrate transferringunit. The third patterning part 300C may include a plurality of thetransferring rolls R.

A third accumulator 400C is disposed adjacent to the third patterningpart 300C. The third accumulator 400C receives the substrates sheet Soutputted from the third patterning part 300C.

The third accumulator 400C transfers the substrates sheet S on which thefirst to third patterns are formed to adjust a processing timing. Forexample, the third accumulator 400C adjusts the processing timingbetween the patterning process of the third patterning part 300C andother processes. For example, the third accumulator 400C may adjust theprocessing timing between the patterning process of the third patterningpart 300C and a drying process of the drying part 500. The thirdaccumulator 400C may adjust the processing timing between the patterningprocess of the third patterning part 300C and multiple patterningprocesses of other patterning parts 300A, 300B and 300D.

The third accumulator 400C may include a substrate transferring unit.The third accumulator 400C may include a plurality of the transferringrolls R.

Although a transferring path of the third accumulator 400C is same astransferring paths of the first and second accumulators 400A and 400B inFIG. 5 for convenience of explanation, the present invention is notlimited thereto. The transferring path of the third accumulator 400C maybe different from the transferring paths of the first and secondaccumulators 400A and 400B.

A fourth patterning part 300D is disposed adjacent to the thirdaccumulator 400C. The fourth patterning part 300D receives thesubstrates sheet S outputted from the third accumulator 400C.

The fourth patterning part 300D forms a fourth pattern on the substratessheet S. The fourth patterning part 300D forms the fourth pattern on theprocessed surface of the substrates sheet S. For example, the fourthpattern may be a red color filter pattern of the color filter substrate.

The fourth patterning part 300D may include a substrate transferringunit. The fourth patterning part 300D may include a plurality of thetransferring rolls R.

A fourth accumulator 400D is disposed adjacent to the fourth patterningpart 300D. The fourth accumulator 400D receives the substrates sheet Soutputted from the fourth patterning part 300D.

The fourth accumulator 400D transfers the substrates sheet S on whichthe first to fourth patterns are formed to adjust a processing timing.For example, the fourth accumulator 400D adjusts the processing timingbetween the patterning process of the fourth patterning part 300D andother processes. For example, the fourth accumulator 400D may adjust theprocessing timing between the patterning process of the fourthpatterning part 300D and a drying process of the drying part 500. Thefourth accumulator 400D may adjust the processing timing between thepatterning process of the fourth patterning part 300D and multiplepatterning processes of other patterning parts 300A to 300C.

The fourth accumulator 400D may include a substrate transferring unit.The fourth accumulator 400D may include a plurality of the transferringrolls R.

Although a transferring path of the fourth accumulator 400D is same astransferring paths of the first to third accumulators 400A to 400C inFIG. 5 for convenience of explanation, the present invention is notlimited thereto. The transferring path of the fourth accumulator 400Dmay be different from the transferring paths of the first to thirdaccumulators 400A and 400C.

The drying part 500 (see FIG. 1 or FIG. 5) is disposed adjacent to thefourth accumulator 400D. The drying part 500 receives the substratessheet S outputted from the fourth accumulator 400D.

The drying part 500 dries the patterns formed on the substrates sheet S.The drying part 500 may include an oven.

The drying part 500 may include a substrate transferring unit. Thedrying part 500 may include a plurality of the transferring rolls R.

The receiving driver 600 is disposed adjacent to the drying part 500.The receiving driver 600 receives the multiple-patterns processedsubstrates sheet S outputted from the drying part 500.

The color filter substrate of a display panel may be formed by thesubstrate processing apparatus of the present exemplary embodiment.

According to the present exemplary embodiment, the transferring rolls donot make contact with the processed surface of the substrate to transferthe substrate and to change the transferring direction of the substrateso that the processed surface of the substrate may be protected.

In addition, the processed surface of the substrate is protected so thata productivity, a reliability and a display quality of the display panelmay be improved and a manufacturing cost of the display panel may bedecreased.

According to the present disclosure of invention as explained above, thetransferring rolls do not make contact with the processed surface of thesubstrate to transfer the substrate and to change the transferringdirection of the substrate so that the processed surface of thesubstrate may be protected.

The foregoing is illustrative of the present disclosure of invention andis not to be construed as limiting thereof. Although a few exemplaryembodiments in accordance with the present teachings have beendescribed, those skilled in the art will readily appreciate in light ofthe foregoing that many modifications are possible in the exemplaryembodiments without materially departing from the novel teachings andadvantages of the present disclosure. Accordingly, all suchmodifications are intended to be included within the spirit and scope ofthe present teachings. In the appended claims, means-plus-functionclauses are intended to cover the structures described herein asperforming the recited function and not only structural equivalents butalso functionally equivalent structures. Therefore, it is to beunderstood that the foregoing is illustrative of the present inventionand is not to be construed as limited to the specific exemplaryembodiments disclosed, and that modifications to the disclosed exemplaryembodiments, as well as other exemplary embodiments, are intended to beincluded within the scope of the present teachings.

What is claimed is:
 1. A substrate transferring unit comprising: aplurality of first transferring rolls making contact with a firstsurface of a substrate, each of the first transferring rolls including afirst central portion charged with a positive electric charge and afirst outer portion surrounding the first central portion; and aplurality of second transferring rolls making contact with the firstsurface of the substrate and disposed alternately with the firsttransferring rolls, each of the second transferring rolls including asecond central portion charged with a negative electric charge and asecond outer portion surrounding the second central portion.
 2. Thesubstrate transferring unit of claim 1, wherein the substrate is aflexible substrate, and the first and second transferring rolls aredisposed along a curved line.
 3. The substrate transferring unit ofclaim 1, wherein the first and second central portions of the first andsecond transferring rolls include a metal, and the first and secondouter portions of the first and second transferring rolls include aninsulating material.
 4. The substrate transferring unit of claim 1,further comprising a plurality of third transferring rolls makingcontact with the first surface of the substrate and not charged.
 5. Thesubstrate transferring unit of claim 4, wherein the first transferringrolls, the second transferring rolls and the third transferring rollsare disposed alternately with one another.
 6. The substrate transferringunit of claim 5, wherein one of the first transferring rolls, one of thesecond transferring rolls, one of the third transferring rolls arealternately disposed with one another.
 7. The substrate transferringunit of claim 5, wherein the N first transferring rolls, the N secondtransferring rolls, the N third transferring rolls are alternatelydisposed with one another, N being a positive integer equal to orgreater than two.
 8. The substrate transferring unit of claim 1, whereinone of the first transferring rolls and one of the second transferringrolls are alternately disposed with each other.
 9. The substratetransferring unit of claim 1, wherein the N first transferring rolls andthe N second transferring rolls are alternately disposed with eachother, N being a positive integer equal to or greater than two.